Company
2009
HQ-Dielectrics® was founded as a privately owned technology company with main focus on semiconductor and photovoltaic industry
2010
- Funding by innovations award from the Free State of Bavaria.
- Various Patents on plasma sticks and technology issued
- First EU project started: SEAL
2011
- Various innovation coupons from Baden-Württemberg for extraordinary innovations in the fields of temperature measurement and production systems for the semiconductors industry
- Shipment of first plasma oxidation process module
2012
Shipment of first fully automated 300 mm plasma oxidation system with atmospheric handling.
2014
- Shipment of first RTP system.
2015
- Shipment of first thermopile based pyrometer
- ECSEL Joint Undertaking project WAYTOGO FAST funding acceptance through Horizon 2020 and project start
2016
First manual HemeraHT RTP system launched.
2017
Follow up orders for HemeraHT RTP systems.
2018
ECSEL Joint Undertaking project REACTION funding acceptance through Horizon 2020 and project start
2019
High Temperature Diamond Annealing Sytem (Diamond Cube) launched.
2020
First HemeraHT & HyperionLT Hybrid System order.
