Hyperion LT
Our low temperature microwave plasma oxidation and nitridation system is equipped with our unique microwave plasma stick array and optional lower tungsten halogen lamp field for additional and separate rapid thermal heating of wafer sizes 50 to 300 mm.
HyperionLT with two FOUP loaders, 300 mm configuration
300 mm Front Open Unified Pods (FOUP)
Touchscreen Man Machine Interface (HQ-D SEC)